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Institute of Electrical and Electronics Engineers, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 9(36), p. 1545-1556, 2017

DOI: 10.1109/tcad.2016.2638440

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Improved Tangent Space-Based Distance Metric for Lithographic Hotspot Classification

Journal article published in 2017 by Fan Yang ORCID, Subarna Sinha, Charles C. Chiang, Xuan Zeng, Dian Zhou
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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