Published in
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
DOI: 10.1109/memsys.2017.7863332
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Nano-G accelerometer using geometric anti-springs
Proceedings article published in 2017 by
B. A. Boom,
A. Bertolini,
E. Hennes,
R. A. Brookhuis,
R. J. Wiegerink,
J. F. J. van den Brand,
M. G. Beker,
A. Oner,
D. van Wees 
This paper is available in a repository.
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