Published in
American Institute of Physics, Journal of Vacuum Science and Technology B, 4(34), p. 041603
DOI: 10.1116/1.4948916
Links
Tools
Novel germanium surface modification for sub-10 nm patterning with electron beam lithography and hydrogen silsesquioxane resist
Journal article published in 2016 by
Anushka S. Gangnaik,
Yordan M. Georgiev,
Gillian Collins,
Justin D. Holmes
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Data provided by 