Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters
Journal article published in 2017 by
Jianbin Guo,
Jinling Wang,
Shengkui Zeng,
Vadim Silberschmidt 
,
Yongguang Shen
,
Yongguang Shen
This paper is made freely available by the publisher.
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