Refreshing results…
Integrated tunneling sensor for nanoelectromechanical systems
Download from www.researchgate.netElectrochemical deposition of Cu and Ni/Cu multilayers in Si Microsystem Technologies
Download from www.researchgate.netUltrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry
Download from www.researchgate.netA read-out strategy and circuit design for high frequency MEMS resonators
Download from www.researchgate.netMicroporous silicon for CMOS compatible MST
Download from www.researchgate.netBESOI-Based Integrated Optical Silicon Accelerometer
Download from www.researchgate.netMissing publications? Search for publications with a matching author name.