Refreshing results…
Fabrication and Test of 3C-SiC Electrostatic Resonators
Download from doi.orgSystem on chip mass sensor based on polysilicon cantilevers arrays for multiple detection
Download from www.researchgate.netSi technology based microinductive devices for biodetection applications
Download from www.researchgate.netIntegrated CMOS-MEMS with on-chip readout electronics for high-frequency applications
Download from www.researchgate.netVibrational Energy Scavenging With Si Technology Electromagnetic Inertial Microgenerators
Download from link.springer.comMissing publications? Search for publications with a matching author name.