Matthias M. Minjauw
0000-0003-3620-8949
2 papers found
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Reaction Pathways for Atomic Layer Deposition with Lithium Hexamethyl Disilazide, Trimethyl Phosphate, and Oxygen Plasma
Plasma-Enhanced Atomic Layer Deposition of Silver Using Ag(fod)(PEt3) and NH3-Plasma
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