Felix Mattelaer - Dissemin

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All papers authored by Felix Mattelaer

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2020 Andreas Werbrouck

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, Felix Mattelaer

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, Matthias Minjauw

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, Frans Munnik, Jolien Dendooven

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, Christophe Detavernier

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Reaction Pathways for Atomic Layer Deposition with Lithium Hexamethyl Disilazide, Trimethyl Phosphate, and Oxygen Plasma

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