Linda Jäckel - Dissemin

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All papers authored by Linda Jäckel

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2024 Linda Jäckel

ORCID

, Andreas Zienert

ORCID

, Annekathrin Zeun

ORCID

, Anna-Sophie Seidel

ORCID

, Jörg Schuster

ORCID

Surface chemistry models for low temperature Si epitaxy process simulation in a single-wafer reactor

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This paper was not found in any repository, but could be made available legally by the author.

2023 Erik E. Lorenz, Joshua Gehre, Linda Jäckel

ORCID

, Jörg Schuster

Film Growth from Particle Raytracing: A Simulation Method for Vapor Deposition Processes with Changing Surface Topographies

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This paper is made freely available by the publisher.

Linda Jäckel

ORCID

, Andreas Zienert, Erik E. Lorenz, Max Huber, Jörg Schuster

Multi-scale simulation of epitaxial processes

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