Annekathrin Zeun - Dissemin

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All papers authored by Annekathrin Zeun

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2024 Linda Jäckel

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, Andreas Zienert

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, Annekathrin Zeun

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, Anna-Sophie Seidel

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, Jörg Schuster

ORCID

Surface chemistry models for low temperature Si epitaxy process simulation in a single-wafer reactor

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