Odile Mourey
www.linkedin.com
0000-0002-8068-8524
Laboratoire des technologies de la microélectronique
3 papers found
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Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas
Dynamic fuel retention in tokamak wall materials: An in situ laboratory study of deuterium release from polycrystalline tungsten at room temperature
Silicon etching using CW, synchronized pulsed and bias pulsed Cl2 plasma
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