All papers authored by Maxime Darnon
Refreshing results…
2015
Maxime Darnon 
,
Mathieu de Lafontaine,
Maïté Volatier,
Simon Fafard,
Richard Arès,
Abdelatif Jaouad,
Vincent Aimez
,
Mathieu de Lafontaine,
Maïté Volatier,
Simon Fafard,
Richard Arès,
Abdelatif Jaouad,
Vincent Aimez
Deep germanium etching using time multiplexed plasma etching
Download from savoirs.usherbrooke.ca
Maxime Darnon ,
Névine Rochat,
Christophe Licitra
,
Névine Rochat,
Christophe Licitra
Modification of porous SiOCH by first contact with water vapor after plasma process
Download from www.researchgate.net
Bruno Lee Sang ,
Bruno Lee Sang,
Marie-Josée Gour,
Abdelatif Jaouad,
Serge Ecoffey,
Maxime Darnon ,
Benattou Sadani,
Abdelkader Souifi,
Dominique Drouin
,
Bruno Lee Sang,
Marie-Josée Gour,
Abdelatif Jaouad,
Serge Ecoffey,
Maxime Darnon ,
Benattou Sadani,
Abdelkader Souifi,
Dominique Drouin
Inductively coupled plasma etching of ultra-shallow Si3N4 nanostructures using SF6/C4F8 chemistry
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2014
K. Lionti,
W. Volksen,
T. Magbitang,
M. Darnon ,
G. Dubois
,
G. Dubois
Toward Successful Integration of Porous Low-k Materials: Strategies Addressing Plasma Damage
Download from jss.ecsdl.org
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