Maxim Kozodaev - Dissemin

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All papers authored by Maxim Kozodaev

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2019 M. G. Kozodaev

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, Y. Y. Lebedinskii

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, A. G. Chernikova

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, E. V. Korostylev

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, A. A. Chouprik

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, R. R. Khakimov

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, Andrey M. Markeev

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Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2

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