Area-selective atomic layer deposition of Ru on electron-beam-written Pt(C) patterns versus SiO<sub>2</sub>substratum
Journal article published in 2017 by
Marcel Junige 
,
Markus Löffler,
Marion Geidel,
Matthias Albert,
Johann W. Bartha,
Ehrenfried Zschech,
Bernd Rellinghaus ,
Willem F. van Dorp
,
Markus Löffler,
Marion Geidel,
Matthias Albert,
Johann W. Bartha,
Ehrenfried Zschech,
Bernd Rellinghaus ,
Willem F. van Dorp
This paper is made freely available by the publisher.
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