Published in
American Institute of Physics, AIP Advances, 4(8), p. 045216
DOI: 10.1063/1.5021051
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MoS2 solid-lubricating film fabricated by atomic layer deposition on Si substrate
Journal article published in 2018 by
Yazhou Huang,
Lei Liu,
Jun Lv,
Junjie Yang,
Jingjie Sha,
Yunfei Chen 
This paper is made freely available by the publisher.
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