Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings
Journal article published in 2017 by
Tzu-Ken Lin,
Wei-Kai Wang,
Shih-Yung Huang,
Chi-Tsung Tasi,
Dong-Sing Wuu 
This paper is made freely available by the publisher.
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