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Pulsed Cl-2/Ar inductively coupled plasma processing: 0D model versus experiments

Journal article published in 2014 by E. Despiau-Pujo, M. Brihoum, P. Bodart, M. Darnon ORCID, G. Cunge
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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