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Alternative Lithographic Technologies III

DOI: 10.1117/12.879367

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Wafer-level fabrication of distributed feedback laser diodes by utilizing UV nanoimprint lithography

Proceedings article published in 2011 by Masaki Yanagisawa, Yukihiro Tsuji, Hiroyuki Yoshinaga, Naoya Kouno, Kenji Hiratsuka
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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