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Society of Photo-optical Instrumentation Engineers, Proceedings of SPIE, 2014

DOI: 10.1117/12.2045754

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An insitu hard mask block copolymer approach for the fabrication of ordered, large scale, horizontally aligned, Si nanowire arrays on Si substrate

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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