Published in
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
DOI: 10.1109/transducers.2013.6626878
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Atomically-precise three-dimensional top down fabrication
Proceedings article published in 2013 by
J. B. Ballard,
J. H. G. Owen,
E. Fuchs,
S. McDonnell,
D. Dick,
G. Mordi,
A. Azcatl,
O. Seitz,
P. Campbell,
J. F. Veyan,
Y. Chabal,
R. M. Wallace 
,
M. Bischof,
D. Jaeger,
R. Reidy
and other authors.
,
M. Bischof,
D. Jaeger,
R. Reidy
and other authors.
This paper was not found in any repository, but could be made available legally by the author.
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