Published in
LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings
DOI: 10.1109/leos.2007.4382491
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Nanopillars and arrays of nanoholes fabricated by extreme ultraviolet interferometric laser lithography
Proceedings article published in 2007 by
P. W. Wachulak 
,
M. G. Capeluto,
D. Patel,
M. C. Marconi,
C. S. Menoni,
J. J. Rocca
,
M. G. Capeluto,
D. Patel,
M. C. Marconi,
C. S. Menoni,
J. J. Rocca
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