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2008 Device Research Conference
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A comparative study of SiN deposition methods for millimeter-wave AlGaN/GaN HFETs
Proceedings article published in 2008 by
Masataka Higashiwaki 
,
Zhen Chen,
Yi Pei,
Rongming Chu,
Stacia Keller,
Nobumitsu Hirose,
Takashi Mimura,
Toshiaki Matsui,
Umesh K. Mishra
,
Zhen Chen,
Yi Pei,
Rongming Chu,
Stacia Keller,
Nobumitsu Hirose,
Takashi Mimura,
Toshiaki Matsui,
Umesh K. Mishra
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