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SpringerOpen, Nanoscale Research Letters, 1(6), 2011

DOI: 10.1186/1556-276x-6-621

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Rolled-up tubes and cantilevers by releasing SrRuO3-Pr0.7Ca0.3MnO3 nanomembranes

Journal article published in 2011 by Christoph Deneke, Elisabeth Wild, Ksenia Boldyreva, Stefan Baunack, Peter Cendula, Ingolf Mönch, Markus Simon, Angelo Malachias, Kathrin Dörr, Oliver G. Schmidt
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO3/Pr0.7Ca0.3MnO3/SrRuO3 nanometer-sized trilayers from SrTiO3(001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 μm are demonstrated. The etching behavior of the SrRuO3 film is investigated, and a selectivity of 1:9,100 with respect to the SrTiO3 substrate is found. The initial and final strain states of the rolled-up oxide layers are studied by X-ray diffraction on an ensemble of tubes. Relaxation of the sandwiched Pr0.7Ca0.3MnO3 layer towards its bulk lattice parameter is observed as the major driving force for the roll-up of the trilayers. Finally, μ-diffraction experiments reveal that a single object can represent the ensemble proving a good homogeneity of the rolled-up tubes.