Published in
2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)
DOI: 10.1109/iitc-mam.2015.7325640
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Investigation of barrier formation and stability of self-forming barriers with CuMn, CuTi and CuZr alloys
Proceedings article published in 2015 by
Mathias Franz,
Ramona Ecke,
Christian Kaufmann,
Jakob Kriz,
Stefan E. Schulz
This paper was not found in any repository, but could be made available legally by the author.
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