Published in
Institute of Electrical and Electronics Engineers, IEEE Transactions on Electron Devices, 10(49), p. 1761-1767, 2002
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Oxynitridation using radical-oxygen and -nitrogen for high-performance and highly reliable n/pFETs
Journal article published in 2002 by
M. Togo,
K. Watanabe,
M. Terai,
S. Kimura 
,
T. Yamamoto,
T. Tatsumi,
T. Mogami
,
T. Yamamoto,
T. Tatsumi,
T. Mogami
This paper was not found in any repository, but could be made available legally by the author.
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