In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process
Journal article published in 2006 by
R. Bankras,
J. Holleman,
J. Schmitz 
,
M. Sturm,
A. Zinine,
H. Wormeester,
B. Poelsema
,
M. Sturm,
A. Zinine,
H. Wormeester,
B. Poelsema
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