Published in
Elsevier, Applied Surface Science, (354), p. 298-305
DOI: 10.1016/j.apsusc.2015.06.167
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Structure dependent resistivity and dielectric characteristics of tantalum oxynitride thin films produced by magnetron sputtering
Journal article published in 2015 by
D. Cristea,
A. Crisan,
N. Cretu,
J. Borges,
C. Lopes 
,
L. Cunha,
V. Ion,
M. Dinescu,
N. P. Barradas,
E. Alves,
M. Apreutesei,
D. Munteanu
,
L. Cunha,
V. Ion,
M. Dinescu,
N. P. Barradas,
E. Alves,
M. Apreutesei,
D. Munteanu
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