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The effect of pattern overlap on the accuracy of high resolution electron backscatter diffraction measurements.

Journal article published in 2015 by Aj Wilkinson ORCID, Vivian Tong ORCID, Jun Jiang, Tb Ben Britton ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

High resolution, cross-correlation-based, electron backscatter diffraction (EBSD) measures the variation of elastic strains and lattice rotations from a reference state. Regions near grain boundaries are often of interest but overlap of patterns from the two grains could reduce accuracy of the cross-correlation analysis. To explore this concern, patterns from the interior of two grains have been mixed to simulate the interaction volume crossing a grain boundary so that the effect on the accuracy of the cross correlation results can be tested. It was found that the accuracy of HR-EBSD strain measurements performed in a FEG-SEM on zirconium remains good until the incident beam is less than 18nm from a grain boundary. A simulated microstructure was used to measure how often pattern overlap occurs at any given EBSD step size, and a simple relation was found linking the probability of overlap with step size.