Published in

Elsevier, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, (216), p. 46-56

DOI: 10.1016/j.nimb.2003.11.019

Links

Tools

Export citation

Search in Google Scholar

Ion beam induced defects in crystalline silicon

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

Green circle
Preprint: archiving allowed
Red circle
Postprint: archiving forbidden
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO