Published in

Elsevier, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1(42), p. 19-28

DOI: 10.1016/0168-583x(89)90005-0

Links

Tools

Export citation

Search in Google Scholar

Sticking probabilities for sputtered Ag AND Au atoms incident on oxidized aluminum surfaces

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

Green circle
Preprint: archiving allowed
Red circle
Postprint: archiving forbidden
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

We have measured the sticking probabilities for sputtered Ag and Au atoms incident on oxidized aluminum surfaces as a function of the areal density of deposited atoms. For Ag sputtered by 200 keV Ar ions, we found a sticking probability at zero coverage of k(0) = 0.46 ± 0.20. For very high coverages, we found k(n > 10^(17)at./cm^2) = 0.80 ± 0.20. For Au sputtered by 200 keV Ar ions, w found k(0) = 0.92 ± 0.08 and k(n > 10^(17)at./cm^2) = 0.80 ± 0.03. For Au sputtered by 200 keV Xe ions, values of k(0) = 0.98 ± and k(n > 10^(17)at./cm^2) = 0.89 ± 0.03 were obtained. In all cases, the sticking probability varied noticeably for densities between o and twenty monolayers. For Au, a maximum value near 1 was observed in this region while for Ag, the sticking probability exhibited a minimum of approximately 35%. Some possible explanations for these results are offered and the implications for collection-type sputtering experiments are discussed.