IOP Publishing, Japanese Journal of Applied Physics, 8R(36), p. 5356, 1997
DOI: 10.1143/jjap.36.5356
Full text: Unavailable
A model of a monolithic silicon LLL scanning X-ray interferometer capable of displacements up to 100 mu m is described. It can be used for the measurement of the (2 (2) over bar 0) lattice plane spacing of silicon in studies concerning the Avogadro constant and for the calibration of linear displacement transducers having sub-nanometer sensitivity.