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American Institute of Physics, Journal of Vacuum Science and Technology A, 1(33), p. 01A103

DOI: 10.1116/1.4891319

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High aspect ratio iridescent three-dimensional metal–insulator–metal capacitors using atomic layer deposition

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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