Published in
American Institute of Physics, Journal of Vacuum Science and Technology B, 6(20), p. 3071
DOI: 10.1116/1.1523402
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Beam alignment for scanning beam interference lithography
Journal article published in 2002 by
Carl G. Chen,
Ralf K. Heilmann,
Chulmin Joo 
,
Paul T. Konkola,
G. S. Pati,
Mark L. Schattenburg
,
Paul T. Konkola,
G. S. Pati,
Mark L. Schattenburg
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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