Published in
American Institute of Physics, Physics of Plasmas, 10(21), p. 103501, 2014
DOI: 10.1063/1.4897172
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Absolute CF2 density and gas temperature measurements by absorption spectroscopy in dual-frequency capacitively coupled CF4/Ar plasmas
Journal article published in 2014 by
Wen-Yao Liu,
Yong Xu,
Yong-Xin Liu,
Fei Peng,
Fa-Ping Gong,
Xiao-Song Li,
Ai-Min Zhu,
You-Nian Wang
This paper was not found in any repository, but could be made available legally by the author.
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