Published in
American Institute of Physics, Applied Physics Letters, 23(104), p. 231603
DOI: 10.1063/1.4882080
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Prediction of porous dielectric line wiggling phenomenon with metallic hard mask: From simulation to experiment
Journal article published in 2014 by
J. Ducoté,
N. Possémé,
T. David,
M. Darnon 
,
T. Chevolleau,
M. Guillermet
,
T. Chevolleau,
M. Guillermet
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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