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American Institute of Physics, Applied Physics Letters, 5(68), p. 693

DOI: 10.1063/1.116594

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Characterization of surface imperfections of silicon-on-insulator wafers by means of extremely asymmetric x-ray reflection topography

Journal article published in 1996 by Shigeru Kimura ORCID, Atsushi Ogura, Tetsuya Ishikawa
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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