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Trans Tech Publications, Solid State Phenomena, (108-109), p. 677-682, 2005

DOI: 10.4028/www.scientific.net/ssp.108-109.677

Trans Tech Publications, Solid State Phenomena, p. 677-682

DOI: 10.4028/3-908451-13-2.677

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Electrical Characterizations of Hydrogenated 4H-SiC Epitaxial Samples

This paper is available in a repository.
This paper is available in a repository.

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Abstract

4H-SiC epitaxial layers were hydrogenated by means of plasma treatment and annealing, aiming at passivating the surface by forming bonds with Si atoms. Ni/SiC Schottky contacts were processed, and investigated by electrical methods (I-V-T, C-V-T, EBIC, DLTS). The annealings were performed at two different temperatures (300°C and 400°C) in H2 ambient. The Inductively Coupled Plasma (ICP) treatment was effected before and after the Schottky contact metallization, and two integrated hydrogen doses were imposed for the same low energy (500 eV/atom). Two deep levels were detected in the gap of the sample hydrogenated at the highest dose before contact deposition, similar to the double defect RD1/2 associated to the vacancy pair VSi-VC. No deep level was found on other plasma-hydrogenated samples, which electrical characteristics are the same than for virgin SiC. A slight improvement of electrical parameters (lowering of ideality factor, increasing of minority carrier diffusion length, better switching behaviour) was only measured on the sample annealed at 400°C.