Institute of Electrical and Electronics Engineers, IEEE Transactions on Instrumentation and Measurement, 2(44), p. 526-529, 1995
DOI: 10.1109/19.377898
Full text: Unavailable
Further details are given of an experiment based on combined X-ray and optical interferometry to measure the (220) lattice spacing of silicon. A resolution of 5 x 10(-9)d(220) was achieved and the silicon d(220) was determined to 3 x 10(-8)d(220) accuracy. The measured value is d(220) = (192015.551 +/- 0.005) fm. After correction for the impurity-induced lattice strain, d(220) = (192015.569 +/- 0.006) fm was obtained.