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Royal Society of Chemistry, Physical Chemistry Chemical Physics, 28(17), p. 18294-18304, 2015

DOI: 10.1039/c5cp01196e

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Electron nanoprobe induced oxidation: a simulation of direct-write purification

Journal article published in 2015 by J. D. Fowlkes, B. Geier, B. B. Lewis, P. D. Rack, M. G. Stanford, R. Winkler, H. Plank
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

A simulation provides insight into the electron beam driven purification of carbon contaminated nanoscale deposits using O2 and H2O gas.