Plasma is an ionized and reactive gas, which is used for sterilization of many kinds of microorganisms (e.g. bacteria, fungi), which reside on the surface of materials (e.g. medical instruments). Plasma sterilization allows to obtain absolute microbiological purity. Plasma can be generated by dielectric barrier discharge, glow discharge (including corona discharge, plasma jets or microjets) and microwave induced plasma. This article summarises literature review on plasma sterilization methods of microorganisms by low-temperature plasma generated under the atmospheric pressure.