Published in
The Electrochemical Society, ECS Journal of Solid State Science and Technology, 9(2), p. P357-P361
DOI: 10.1149/2.013309jss
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Multi-Scale Thickness and Roughness Characterization of Thin Silicon-On-Insulator Films
Journal article published in 2013 by
Pablo E. Acosta-Alba,
Oleg Kononchuk,
Grégory Riou,
Cécile Moulin,
Christelle Bertrand-Giuliani,
Alain Claverie,
Pablo Acosta Alba
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