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Elsevier, Surface and Coatings Technology, 4(206), p. 617-622

DOI: 10.1016/j.surfcoat.2011.03.050

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TiBCN:CN x multilayer coatings deposited by pulsed closed field unbalanced magnetron sputtering

Journal article published in 2011 by Jianliang Lin, John J. Moore, Malki Pinkas, Dalong Zhong, William D. Sproul
This paper is available in a repository.
This paper is available in a repository.

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Abstract

In this study, a combination of nanocomposite and multilayer coating design was investigated in an effort to reduce the coefficient of friction (COF) while maintaining good mechanical properties of the TiBCN coatings. The TiBCN:CNx coatings consist of TiBCN and CNx nanolayers which were deposited alternately by reactive sputtering a TiBC composite target (80mol% TiB2+20mol% TiC) and a graphite target in an Ar:N2 mixture using a pulsed closed field unbalanced magnetron sputtering system. Low angle X-ray diffraction and transmission electron microscopy characterizations confirmed that the coatings consist of different bilayer periods in a range of 3.5 to 7.0nm. The TiBCN layers exhibited a nanocomposite structure, whereas the CNx layers were in an amorphous state. The mechanical properties and wear resistance of the TiBCN:CNx multilayer coatings were investigated using nanoindentation and ball-on-disk wear test. The TiBCN:CNx coatings exhibited high hardness in a range of 20–30GPa. The highest hardness of 30GPa was achieved in the coating with a bilayer period of 4.5nm. A low COF of 0.17 sliding against a WC-Co ball was obtained at a bilayer period of 4.5nm, which is much lower than those of the single layer TiBCN and TiBC nanocomposite coatings (0.55–0.7).