Published in
American Institute of Physics, Applied Physics Letters, 1(106), p. 011904
DOI: 10.1063/1.4905597
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Spectroscopic ellipsometry on Si/SiO2/graphene tri-layer system exposed to downstream hydrogen plasma: Effects of hydrogenation and chemical sputtering
Journal article published in 2015 by
Baran Eren,
Wangyang Fu,
Laurent Marot,
Michel Calame,
Roland Steiner,
Ernst Meyer
This paper is available in a repository.
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