Published in
Elsevier, Microelectronic Engineering, (102), p. 36-39
DOI: 10.1016/j.mee.2012.05.020
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Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
Journal article published in 2013 by
Fan Liu,
Kheng Boon Tan,
M. P. Malar,
S. K. Bikkarolla 
,
J. A. van Kan
,
J. A. van Kan
This paper is available in a repository.
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