Si lattice parameter measurement by centimeter X-ray interferometry
This paper is made freely available by the publisher.
Full text: Download
Preprint: archiving forbidden
Data provided by 
Abstract
A combined X-ray and optical interferometer capable of centimeter displacements has been made to measure the lattice parameter of Si crystals to within a 3 x 10(-9) relative uncertainty. This paper relates the results of test measurements carried out to assess the capabilities of the apparatus.