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American Chemical Society, ACS Applied Materials and Interfaces, 16(6), p. 13707-13715, 2014

DOI: 10.1021/am503160w

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Local Modification of the Microstructure and Electrical Properties of Multifunctional Au-YSZ Nanocomposite Thin Films by Laser Interference Patterning

This paper is available in a repository.
This paper is available in a repository.

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Abstract

Nanocomposite films consisting of gold nanoparticles embedded in a yttria-stabilized zirconia matrix (Au-YSZ) have been synthesized with different gold loadings by reactive magnetron sputtering followed by ex situ annealing in air or laser interference patterning (LIP) treatment. It is shown that the electrical conductivity of the nanocomposite films can be modified to a large extent by changing the gold loading, by thermal annealing or LIP. The structural and microstructural analysis evidenced the segregation of metallic gold in crystalline form for all synthesis conditions and treatments applied. While thermal annealing above 400°C is observed to trigger the growth of pre-existing nanoparticles in the volume of the films, significant modifications of the microstructure were detected within the interference spot (spot size close to 2 x 2 mm2) of LIP treatments only for the regions corresponding to constructive interferences. In contrast to other parameters, the LIP treatment enables to tailor locally the electrical resistivity, which can be of interest for microsystems.