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The 17th Annual SEMI/IEEE ASMC 2006 Conference

DOI: 10.1109/asmc.2006.1638742

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F A R O S -- Fully Automated Robotic Sorter Cluster Use for Single Wafer Tracking in Semiconductor Manufacturing

Proceedings article published in 1 by F. Heinlein, A. Kuehn
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

In this paper, we describe the beneficial combination of a fully automated robotic sorter approach called FAROS and the single wafer tracking concept for Infineon's mid nineties 8" wafer fab in Dresden, Germany. We describe the system itself, its implementation, and utilization within a single wafer tracking front end manufacturing environment including randomization. A discussion of typical performance indicators for semiconductor production equipment sheds light on the capability and economics of the FAROS system