The 17th Annual SEMI/IEEE ASMC 2006 Conference
DOI: 10.1109/asmc.2006.1638742
Full text: Unavailable
In this paper, we describe the beneficial combination of a fully automated robotic sorter approach called FAROS and the single wafer tracking concept for Infineon's mid nineties 8" wafer fab in Dresden, Germany. We describe the system itself, its implementation, and utilization within a single wafer tracking front end manufacturing environment including randomization. A discussion of typical performance indicators for semiconductor production equipment sheds light on the capability and economics of the FAROS system