The 17th Annual SEMI/IEEE ASMC 2006 Conference
DOI: 10.1109/asmc.2006.1638775
Full text: Unavailable
This paper discusses advantages and disadvantages of smaller transfer batch size in an automated semiconductor factory. A framework is suggested by which the "theoretical" cycle time is determined from the point-of-view of the wafer, not the lot. Using this framework, we then look at the possible application of a "virtual cluster tool" by identifying requirements on the process times and transport system. Benefits and risks are then discussed for the approach, using a simple example