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The 17th Annual SEMI/IEEE ASMC 2006 Conference

DOI: 10.1109/asmc.2006.1638775

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Cycle Time Perspectives for Small Transfer Batch Size

Proceedings article published in 1 by D. R. Wright, T. Chang
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

This paper discusses advantages and disadvantages of smaller transfer batch size in an automated semiconductor factory. A framework is suggested by which the "theoretical" cycle time is determined from the point-of-view of the wafer, not the lot. Using this framework, we then look at the possible application of a "virtual cluster tool" by identifying requirements on the process times and transport system. Benefits and risks are then discussed for the approach, using a simple example