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Published in

American Institute of Physics, Applied Physics Letters, 26(98), p. 261106

DOI: 10.1063/1.3605592

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AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate

This paper is available in a repository.
This paper is available in a repository.

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Abstract

An original method to fabricate III-nitride photonic crystal membranes without etching of III-N materials is reported. A photonic crystal pattern is first realized in a silicon substrate. GaN quantum dots embedded in a thin AlN layer are then grown by conformal epitaxy using ammonia-based molecular beam epitaxy on the top of the patterned silicon substrate and a free-standing membrane is achieved by selective etching of the silicon substrate through the holes of the photonic crystal. Room temperature microphotoluminescence measurements show a quality factor as high as 1800 at 425 nm on a modified L3 cavity. Possibility to achieve lasing with this system is discussed.